Comet 4 station wet


8” transfer
25/25 to 50
13/12 to 25

Comet 4 station wet system is a friendly, clean, reliable and robust Mass Wafer Transfer system.
Customized for your different boats and carriers.
Fully automatic, Comet 4 Station can be integrated inside a WET bench. Comet 4 station allows transfer 2x25 wafers from transport cassettes to a 50 position process boat.
Compatible with your communication requirements and other manufacturer’s processing equipment.
More information

Comet MLT transfer


Automatic transfer
1 to 200 wafers / 150 or 200mm transfer
Loader capacity from 6 to 12 cassettes

The Comet philosophy about production tube furnace is a complete automation from wafer load to wafer unload in one-button operation.
The Comet loader activity is less contaminating to the wafers than manual handling, increasing the productivity and reducing the risk of scratches due to the operator handling.
Fully automated, connected to the host, the Robot is able to recognize each carrier and boat after unloading the wafers from the furnace.
More information

Comet Gemini monostation transfer system



Transfer 25 to 25
200m 13/12 to 25

Gemini is the world’s smallest wafer transfer system.
Semi automatic, this machine has the smallest footprint ever seen in a fab and can load and unload 25 wafers from cassette to cassette in less than 30 seconds.
More information

Comet monostation



Transfer 25 to 25
3” to 8”

Using Comet monostation is the easiest way to transfer 25 wafers from cassette to cassette or cassette to boat.
This Comet is fast, clean, reliable and accurate.
Customized for your different boats and carriers.
Compatible with your communication requirements and other manufacturer’s processing equipment.
Integrated Infrared Heat Sensor.
More information

Comet 2 station

Transfer 25 to 25
3” to 8”
Fully automatic
Free hand operating

The Comet 2 station is the easy way to transfer 25 wafers from cassette to cassette or cassette to boat.
This Comet is fast, clean, reliable and accurate.
Customized for your different boats and carriers.
Compatible with your communication requirements and other manufacturer’s processing equipment.
More information

Comet 2 station back to back

Transfer 25 to 25
3” to 8” fully automatic
BTB free hand operating
Can be integrated with Robotic arm & elevator

The Comet 2 station BTB system is a friendly, clean, reliable and robust Mass Wafer Transfer system, customized for your different boats and carriers.
The 2 station BTB allows the transfer of 25 wafers from transport cassette to 25 position process boat with a complete rotation of the wafers. Fully automatic, the 2 Station can be integrated inside a WET bench.
More information

Comet 2 station pitch changing

Transfer 25 to 25
From 6” carrier to 8” carrier
Fully automatic
Free hand operating

Comet 2 station Pitch Changing system is a friendly, clean, reliable and robust Mass Wafer Transfer system, customized for your different boats and carriers.
Comet 2 station Pitch Changing allows for the transfer of 25 wafers from 6” cassette (4.76mm pitch) to 8” cassette (6.35mm pitch).
More information

Comet 3 station

Transfer 25 to 25
25/25 to 50
12/13 to 25
From 3” carrier to 8” carrier/boat

The Comet 3 station is the Operator’s favorite Mass Wafer Transfer System.
This Comet is fast, clean, reliable and accurate.
Customized for your different boats and carriers.
Compatible with your communication requirements and other manufacturer’s processing equipment.
Integrated Infrared Heat Sensor Simple to use and easy to maintain.
More information

Comet 3 station back to back


Transfer 25 to 25
From 3” to 8”
Proximity / Same slot / Boron Nitride

Using Comet 3 station BTB is the easiest way to transfer 25 wafers face to face (or back to back).
Proximity or same slot process.
The best mass transfer system for a safe back to back transfer.
Adapted for Solid Source,WET or LTO process.
More information

Comet PTP (pod to pod) transfer system

Transfers 200mm
25 to 25
POD to POD / POD to open cassette
Through the wall (CMP/clean room)

This Comet System transfers automatically 25 wafers from one POD to another POD or from one POD to an open cassette.
Customized for your different application the PTP can be the link between 2 different classes area (CMP to clean room and back).
More information