Comet 2 station back to back
25 to 25

The Comet 2 station BTB system is a friendly, clean, reliable and robust Mass Wafer Transfer system, customized for your different boats and carriers.
The 2 station BTB allows the transfer of 25 wafers from transport cassette to 25 position process boat with a complete rotation of the wafers.
Fully automatic, the 2 Station can be integrated inside a WET bench.
Compatible with your communication requirements and other manufacturer’s processing equipment.
Easy to integrate in your process line and customizable (OEM customer).
Integrated Infrared Heat Sensor.
Simple to use and easy to maintain.
One button system operation.
LCD display indicating all cycle steps.
Set up machine directly from the keyboard.
Electronic Parts compatible for all Comet.

TRANSFER 25 to 25
3” to 8” FULLY AUTOMATIC BTB FREE HAND OPERATING
Can be integrated with Robotic arm and elevator

Options


Flat or notch aligner
SECSII-GEM communication
ESD combs
Performance

Cycle time: < 1 mn
Uptime: 99.8%
MTBF: > 4000 hrs
MTBA: 750 hrs
MTTR: < 1hr
MTTA: 0.005 hr
Particle count: < 0.05@ 0.14 PWP
Breakage rate: 1 for 5.105
Standard safety features
Peek material for pushers,retainers and boat adapters
IR heat sensor
Double cassette sensors
Boat sensor
Wafer detection into cassette
Wafer detection into boat
Current limit on all motors
Power “off” security
Automatic home position
Carrier correctly positioned (mechanical)
Historical data recorded (error messages, date, time)

Facilities requirements

Weight: 45 kg
Power: 100-240 VAC, 50-60 hz, 1.2-0.6 A, 75 watts
No need for compressed air

Software flexibility

Transfer parameters adjustable to reduce cycle time
Security sensor management
RS 232 host connection

Specifications

CE certification
SEMI standard
Class 1