Comet 3 station back to back

Using Comet 3 station BTB is the easiest way to transfer 25 wafers face to face (or back to back).
Proximity or same slot process.
The best mass transfer system for a safe back to back transfer.
Adapted for Solid Source,WET or LTO process.
This Comet is Fast, clean, reliable and accurate.
Customized for your different boats and carriers.
Compatible with your communication requirements and other manufacturer’s processing equipment.
Integrated Infrared Heat Sensor simple to use and easy to maintain.
One button system operation.
LCD display indicating all cycle steps.
Set up machine directly from the keyboard.
Electronic Parts compatible for all Comet.

TRANSFER 25 to 25
From 3” to 8”
Proximity
Same slot
Boron Nitride

Options

Flat or notch aligner
SECSII-GEM communication
Boron nitride disks (solid source)
ESD combs
Performance
Cycle time: < 1 mn
Uptime: 99.8%
MTBF: > 4000 hrs
MTBA: 750 hrs
MTTR: < 1hr
MTTA: 0.005 hr
Particle count: < 0.05@ 0.14 PWP
Breakage rate: 1 for 5.105
Standard safety features
Peek material for pushers, retainers and boat adapters
IR heat sensor
Double cassette sensors
Boat sensor
Wafer detection into cassette
Wafer detection into boat
Current limit on all motors
Power “off” security
Automatic home position
Carrier correctly positioned (mechanical)
Historical data recorded (error messages, date, time)

Software flexibility

Transfer parameters adjustable to reduce cycle time
Security sensor management
RS 232 host connection

Specifications

CE certification
SEMI standard
Class 1
Facilities requirements

Weight: 65 kg
Power: 100-240 VAC, 50-60 hz, 1.2-0.6 A, 75 watts
No need for compressed air