Comet 4 station wet

Comet 4 station wet system is a friendly, clean, reliable and robust Mass Wafer Transfer system.
Customized for your different boats and carriers.
Fully automatic, Comet 4 Station can be integrated inside a WET bench.
Comet 4 station allows transfer 2x25 wafers from transport cassettes to a 50 position process boat.
Compatible with your communication requirements and other manufacturer’s processing equipment.
Simple to use and easy to maintain.
One button system operation.
LCD display indicating all cycle steps.
Set -up machine directly from the keyboard.
Electronic Parts compatible for all Comet.
Can be integrated with Robot arm and elevator systems.

8” TRANSFER
25/25 to 50
13/12 to 25

Options

Flat or notch aligner
SECSII-GEM communication
ESD combs

Performance

Cycle time: < 1 mn
Uptime: 99.8%
MTBF: > 4000 hrs
MTBA: 750 hrs
MTTR: < 1hr
MTTA: 0.005 hr
Particle count: < 0.1 @ 0.16 micron PWP
Breakage rate: 1 for 5.105
Standard safety features
Peek material for pushers, retainers and boat adapters
IR heat sensor
Double cassette sensors
Boat sensor
Wafer detection into cassette
Wafer detection into boat
Current limit on all motors
Power “off” security
Automatic home position
Carrier correctly positioned (mechanical)
Historical data recorded (error messages, date, time)

Facilities requirements

Weight: 52 kg
Power: 100-240 VAC, 50-60 hz, 1.2-0.6 A, 75 watts
No need for compressed air

Software flexibility

Transfer parameters adjustable to reduce cycle time
Security sensor management
RS 232 host connection

Specifications

CE certification
SEMI standard
RS 232 port