Gemini monostation transfer system

Gemini is the world’s smallest wafer transfer system.
Semi automatic, this machine has the smallest footprint ever seen in a fab and can load and unload 25 wafers from cassette to cassette in less than 30 seconds.
The position of the wafers (in the rear of the machine) during the transfer secures the wafers, provides a good result from contamination tests and avoids operator error with the carrier.
Integrated Infrared Heat Sensor.
Simple to use and easy to maintain.
One button system operation.
ESD combs standard.

Transfer 25 to 25
200mm 

Option

Wafer mapping (cross slot detection)

Performance

Cycle time: < 1 mn
Uptime: 99,8%
MTBF: >4000hrs
MTBA: 750 hrs
MTTR: < 1hr
MTTA: 0.005 hrs
Particle count: < 0.05@ 0.14 PWP
Breakage rate: 1 for 5.105
Standard safety features
ESD material for pushers and retainers
IR heat sensor
Double cassette sensors
Boat sensor
Wafer detection into cassette
Current limit on all motors
Power “off” security
Automatic home position
Carrier correctly positioned (mechanical)

Specifications

CE certification
SEMI standard
Class 1

Facilities requirements

Weight: kg
Power: 100-240 VAC, 50-60 hz, 1.2-0.6 A, 75 watts
No need for compressed air