Comet MLT transfer

The Comet philosophy about production tube furnace is a complete automation from wafer load to wafer unload in one-button operation.
The Comet loader activity is less contaminating to the wafers than manual handling, increasing the productivity and reducing the risk of scratches due to the operator handling.
Fully automated, connected to the host, the Robot is able to recognize each carrier and boat after unloading the wafers from the furnace.
On line scanning of the wafers allows the Robot to load and unload dummies wafers and prevent cross slotting.
This Comet unit is fast, clean, reliable and accurate.
Customized for your different boats and carriers.
Compatible with your communication requirements and other manufacturer’s processing equipment.
Integrated Infrared Heat Sensor Simple to use and easy to maintain.
One button system operation.
LCD display indicating all cycle steps.
Set-up machine directly from the keyboard.
Electronic Parts compatible for all Comet.

AUTOMATIC TRANSFER
1 to 200 wafers
150 or 200mm transfer
Loader capacity from 6 to 12 cassettes

Options

Flat or notch aligner
SECSII-GEM communication
ESD combs

Performance

Average loading/unloading time < 4mn for 150 wafers

Standard features

Optimized footprint
Operator touch screen
Easy for integration to any 150 or 200mm tool
Interface RJ45 or RS 232/TCP/IP
MTBF:> 3000 hrs
MTBA: 750 hrs
MTTR:< 1 hr
Particle count:< 0.05@ 0.14 PWP
Breakage rate:1 for 5.104

Specification

CE certification
SEMI standard
Class 1

Software flexibility

Standard or customizable software
Restart after error
Option multiple
Friendly interface and customizable
Easy integration with other systems by SECII-GEM, ASCII, RS, TCPIP

Facility requirements

Weight:150 kg
Power:100-240 VAC, 0-60 hz
Full load consumption: 1,2 amps
No need for compressed air