Comet Monostation

25 to 25 wafers
Using Comet monostation is the easiest way to transfer 25 wafers from cassette to cassette or cassette to boat.
This Comet is fast, clean, reliable and accurate.
Customized for your different boats and carriers.
Compatible with your communication requirements and other manufacturer’s processing equipment.
Integrated Infrared Heat Sensor.
Simple to use and easy to maintain.
One button system operation.
LCD display indicating all cycle steps.
Set up machine directly from the keyboard.
Electronic Parts compatible for all Comet.

Transfer 25 to 25
3” to 8”

Options

Flat or notch aligner
SECSII-GEM communication
ESD combs

Performance

Cycle time: < 1 mn
Uptime: 99.8%
MTBF: >4000hrs
MTBA: 750 hrs
MTTR: < 1hr
MTTA: 0.005 hr
Particle count: < 0.05@ 0.14 PWP
Breakage rate: 1 for 5.105
Standard safety features
Peek material for pushers, retainers and boat adaptors
IR heat sensor
Double cassette sensors
Boat sensor
Wafer detection into cassette
Wafer detection into boat
Current limit on all motors
Power “off” security
Automatic home position
Carrier correctly positioned (mechanical)
Historical data recorded (error messages data time)

Facilities requirements

Weight: 33 kg
Power: 100-240 VAC
50-60 hz
1.2-0.6 A
75 watts

No need for compressed air
Software flexibility

Transfer parameters adjustable to reduce cycle time
Security sensor management
RS 232 host connection

Specifications

CE certification
SEMI standard
Class 1