COMET PTP (POD TO POD)
TRANSFER SYSTEM

This Comet System transfers automatically 25 wafers from one POD to another POD or from one POD to an open cassette.
This equipemnt, like most of R2D devices and systems, is fast, clean, reliable and accurate.
Customized for your different application the PTP can be the link between 2 different classes area (CMP to clean room and back).
Compatible with your communication requirements and other manufacturer’s processing equipment.
Integrated Infrared Heat Sensor.
Simple to use and easy to maintain.
One button system operation.
LCD display indicating all cycle steps.
Set up machine directly from the keyboard.
Electronic Parts compatible for all Comet.

Transfers 200mm
25 ‡ 25
POD to POD
POD to open cassette
Through the wall (CMP/clean room)

Options

Flat or notch aligner
SECSII-GEM communication
ESD combs
TAG reader

Performance

Cycle time: < 1 mn
Uptime: 99.8%
MTBF: > 4000 hrs
MTBA: 750 hrs
MTTR: < 1hr
MTTA: 0.005 hr
Particle count: < 0.05@ 0.14 PWP
Breakage rate: 1 for 5.105
Standard safety features
Peek material for pushers,retainers and boat adapters
IR heat sensor
Double cassette sensors
Boat sensor
Wafer detection into cassette
Wafer detection into boat
Current limit on all motors
Power “off” security
Automatic home position
Carrier correctly positioned (mechanical)
Historical data recorded (error messages, date, time)

Facilities requirements

Weight: 130 kg
Power: 100-240 VAC, 50-60 hz, 1.2-0.6 A, 75 watts
No need for compressed air

Software flexibility

Transfer parameters adjustable to reduce cycle time
Security sensor management
RS 232 host connection

Specifications

CE certification
SEMI standard
Class 1