Comet 300mm PTB buffer

In 1996, Comet introduced the 300mm advanced generation of fully automatic wafer handling and management systems.
With Comet 300PTB, we provide you with an outstanding integrated buffer that reduces the waiting queue and thus increases the throughput of your process tools.
Compact, fast, reliable and customized, Comet 300PTB is designed to meet the most specific needs.
FOUP/FOSBY/FFO compatible, Comet 300PTB is fully semi compliant.

Options

OHT/AGV/PGV load port
Ionization system
Fan filter unit
Bar code gun
Additional load port
FOUP capacity: 7 to 21
PERFORMANCE
Average loading/unloading time:15 sec.

Standard features

Fully automated FOUP/FOSB/FFO management
Optimized footprint
Operator touch screen
1 or 2 load port
Storage capacity expandable to fully feet your needs
Easy for integration to any 300mm process tool
IR/FR or barcode FOUP Id
Interface RJ45 or RS 232/TCP/IP
OHT/AGV/PGV load port
Tower light.

Specification

CE and SEMI compliant

Software flexibility

Standard or customizable software
FOUP recoveries
Restart after error
Option multiple
Friendly interface and customizable
Easy integration with others system by SECII-GEM, ASCII, RS, TCPIP.

Facility requirements

Weight: 720kg
Power: 100-240 VAC, 50-60 hz, 5-15 A, 3.6 kw
No need for compressed air.