 Options
Ionization system
Fan filter unit
Bar code gun
Empty/cross/double slot mapping
Performance
Average loading/unloading time < 1mn
Standard features
Fully automated FOUP/FOSB/FFO management
Optimized footprint
1 or 2 load port
Operator touch screen
Easy for integration to any 300mm tool
IR/FR or barcode FOUP ID
Interface RJ45 or RS 232/TCP/IP
OHT/AGV/PGV load port
Tower light
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Specification
CE certification
SEMI Standard
Class1
Software flexibility
Standard or customizable software
Wafer recoveries
Restart after error
Option multiple
Friendly interface and customizable
Easy integration with other systems by SECII-GEM, ASCII, RS, TCPIP
Facility requirements
Weight: 650 kg
Power: 100-240 VAC, 50-60 hz
Full load consumption: 5 amps
No need for compressed air |
