Comet full automation

Full Comet Automation means Wafer Transfer System + Elevator + Conveyor in one solution
Compatible 125 & 156 mm
from 100µm wafer thickness
Cassettes 25, 50, 100 slots, diamond or square position.
Conveyor for cassette buffering IN/OUT
Boats process buffer
Friendly operator interface

Options

Depending of your requirements, some options are available.

Performance

Minimizing the risk of scratches and particle generations, the COMET Full automation is fast and reliable.

Facilities requirements

No special requirements.

Software flexibility

Software customization.

Specifications

Done with your specifications.