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Comet sorters

150, 200 and 300mm wafer management system

COMET SORTERS 6", 8" and 300 mm

The COMET Sorters are compact, fast, reliable and meet your different requirements.
The COMET Sorter with OCR is integrating an optical notch aligner and OCR system for front and back scribe reading
Comet provides standard recipes as ID Sorting, Randomizing, Compacting, using or not scribe criterias
You create your own recipes using different parameters

Comet is using motors, belts and other parts proven by 16 years of experience in Fab automations
The spare parts for all your different COMET Systems are listed in only one page
The visual interface is clear, direct and can be customized 
Touch buttons, Touchscreen, Trackball interfaces. 

3 LOAD PORT SORTER

 

 



        WET PROCESS - OEM               DIFFUSION               STANDALONE SORTING         VISUAL INPECTION
 

Options

Thin Wafers
Laminar Flow
FOUP opener
FOUP ID
Ionization system
Fan filter unit

Standard features

Fully automated
Edge or back side contact
Optimized footprint
1,2,3 or 4 load port
Operator touch screen
Easy for integration to any process tools
IR/FR or barcode FOUP Id
Interface RJ45 or RS 232/TCP/IP
Tower light

 

Specification

CE and SEMI compliant
Class 1

Software flexibility

Standard or customizable software
Wafer recoveries
Restart after error
Friendly interface and customizable
Easy integration with others system by SECII-GEM, ASCII, RS, TCPIP

Facility requirements

Power: 100-240 VAC, 50-60 hz
Vacuum
Full load consumption: 10Amps




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