Comet vertical sorter (CVS)

The CVS insures the transfer of a complete batch of wafers from a transport carrier into a process carrier.
Thanks to its wafer scanning, Comet CVS detects empty slots and adds dummies when necessary.
With the TAG reader, Comet CVS keeps in memory all carrier ID loaded and recognizes them to secure unloading.
Integrated Infrared Heat Sensor Simple to use and easy to maintain.
One button system operation.
LCD display indicating all cycle steps.
Set-up machine directly from the keyboard.

Wafer Size 6” or 8” transfer
Batch transfer
Single transfer
Automatic dummies insertion

Options

Flat or notch aligner
SECSII-GEM communication
ESD combs

Performance

Cycle time: < 1 mn
Uptime: 99.8%
MTBF: >4000hrs
MTBA: 750 hrs
MTTR: < 1hr
MTTA: 0.005 hr
Particle count: < 0.05@0.14 PWP
Breakage rate: 1 for 5.105
Standard safety features
Peek material for pushers, retainers and boat adapters
IR heat sensor
Double cassette sensors
Boat sensor
Wafer detection into cassette
Wafer detection into boat
Cross slotting detection (mapping)
Bar code reader for process boat identification
Current limit on all motors
Power “off” security
Automatic home position
Carrier correctly positioned (mechanical)
Historical data recorded (error messages, date, time)

Specifications

CE certification
SEMI standard
Class 1

Software flexibility

Transfer parameters adjustable to reduce cycle time
Security sensor management
RS 232 host connection

Facilities requirements

Weight: 60 kg
Power: 100-240 VAC, 50-60 hz, 1.2-0.6 A, 75 watts
No need for compressed air