 Options
Different capacities and performances are available. Normaly it is depending of your available room. Different loadports can be used. The Comet stocker is compatible with your tracking & MCS system. Do not hesitate to contact us.
Performance
The average of one transfer from shelf to loadport is about 14 seconds. The Preventive Maintenance is reduced to the minimum in order. The COMET Clean Concept assure a Class 1 inside the Stocker. N2 purge can be used if necessary. |
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Facilities requirements
The Comet Stocker are either standalone or remote controled. The Comet stocker can moved in your fab and its capacity can be increased matching with your production flow.
Software flexibility
The Comet Software is customized with your specifications. Data collection and statistic function are available. Do not hesitate to contact us for futher detais.
Specifications
Stockers for Foup, Fosb, FFO, Smif Pod or Open cassette. |
