Comet ES 300mm stocker

In 1996, Comet introduced the 300mm advanced generation of fully automatic wafer handling and management systems.
With the Comet ES 300 stocker we provide you with a fully automated stand alone FOUP/FOSBY/FFO storage system.
The modular design of the Comet ES 300 stocker allows expandable storage capacity and easy integration inside the fab.
Compact, fast, reliable and customized, the Comet 300 ES stocker is designed to meet the fab requirements.

ES 300 120 FOUPs/FOSBs
1450x3000x4330 per module
modular dimensions

Options

OHT/AGV/PGV load port
Ionization system
Fan filter unit
Bar code gun
Additional load port
PERFORMANCE
Average loading/unloading time: 15 sec.

Standard features

Fully automated FOUP/FOSB/FFO management
Optimized footprint
1 or 2 load port
Storage capacity expandable to fully feet your needs
Operator touch screen
IR/FR or barcode FOUP Id
Interface RJ45 or RS 232/TCP/IP
Auto-adjustment
OHT/AGV/PGV load port
Tower light
UPS

Specification

CE and SEMI standard

Software flexibility

Standard or customizable software
FOUP recoveries
Restart after error
Option multiple
Friendly interface and customizable
Easy integration with others system by SECII-GEM, ASCII, RS, TCPIP…

Facility requirements

Weight: 1200 kg
Power: 100-240 VAC, 50-60 hz, 5-15 A, 3.6 kw
No need for compressed air