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Comet stocker / buffer solutions

Comet reticle stocker

The Comet Reticle Stocker storages Box or Bare reticles.

Custom designed upon specifications, the Comet Reticle Stocker is also Full Semi Standard compliant.

Different configuration are available.

COMET 16 years of experience, guarantees Safeties and reliability

 

NIKON, ASML, CANON  Boxes 

 


Options

N2 Flow. Particle checker. Transfer system from box to box.

Performance

Transfer average time 15 seconds.
Class 1
Semi Standard Compliant

 

Software flexibility

Customized Software.

Specifications

Customized capacities depending of your rooms.




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