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GEMINI


Product description

With its very small footprint, the GEMINI is one of the smallest semi-automatic batch wafer transfer systems available worldwide. Simple to use and easy to maintain, this tool can load and unload a batch of wafers 6″ or 8″ from cassette to cassette in less than 30 seconds. The batch can contain from 1 to 25 wafers to be transferred.

The GEMINI is customized to meet your different cassette and wafer specifications needs. Already compatible with all the most used cassettes and wafers on the semiconductor industries, the GEMINI can also be designed for special customers needs.

 

 

 


Product information

Key system features

  • Batch wafer transfer  from cassette to cassette
  • Wafer size  6″ &  8″
  • Very small footprint
  • Customized accorfing customer cassettes and wafers

Standard features

  • POM ESD pushers and retainers
  • Double cassette sensors
  • Ergonomic buttons (bigger and brighter)
  • Wafer presence detection in cassette
  • Wafer presence detection on head
  • Wafer down safety detection
  • Current limiters on all motors
  • Electric safety device (current cut)
  • Power « off » security
  • Top pushers safety interlock
  • Open frame, designed for a vertical laminar flow
  • Automatic home position
  • Clean room color paper documentation

Specifications

  • CE certification
  • SEMI Standard
  • Class 1

Performance

  • Total Cycle time: < 1 mn
  • MTBF: > 4000 hours
  • MTTR: < 1 hour
  • UPTIME: > 99 %

Facilities and Requirements

  • Width: 204mm ; Depth: 551mm ; Height: 570mm
  • Weight: 12 kg
  • Power: 100-240 VAC
  • Frequency: 50-60 Hz
  • Full Load Amps: 1.2-0.6 A
  • No need for compressed air