With its very small footprint, the GEMINI is one of the smallest semi-automatic batch wafer transfer systems available worldwide. Simple to use and easy to maintain, this tool can load and unload a batch of wafers 6″ or 8″ from cassette to cassette in less than 30 seconds. The batch can contain from 1 to 25 wafers to be transferred.
The GEMINI is customized to meet your different cassette and wafer specifications needs. Already compatible with all the most used cassettes and wafers on the semiconductor industries, the GEMINI can also be designed for special customers needs.
Key system features
Facilities and Requirements