PRODUCT RANGES
HORIZONTAL FURNACE AUTOMATION
The GEMINI Aligner is a semi-automatic batch wafer transfer system with an integrated notch/flat aligner. With its vey small footprint, this tool can load and unload from cassette to cassette, a batch of wafers 6″ or 8″, thin or thick, of any substrate material.
The LISA-AE system is a Full Automation for Horizontal Furnace, with a POD opener dock and a R2D COMET system integrated to transfer wafer batches from POD to short boats, and using a 6 axis robot to load/unload boats to the furnace paddles.
The EMMA system is a Full Automation for Horizontal Furnace, loading/unloading wafer batches from cassettes to a long boat, and unloading/reloading boats from the wafer transfer system to the furnace.