Horizontal Furnace Automation
EMMA
The EMMA system is a Full Automation for Horizontal Furnace, loading/unloading wafer batches from cassettes to a long boat, and unloading/reloading boats from the wafer transfer system to the furnace.
LISA-AE
The LISA-AE system is a Full Automation for Horizontal Furnace, with a POD opener dock and a R2D COMET system integrated to transfer wafer batches from POD to short boats, and using a 6 axis robot to load/unload boats to the furnace paddles.
Horizontal Batch Transfer
HBT Stand Alone
The HBT Stand Alone system are Horizontal Batch Transfer machine allowing transfer in batches, batch splitting and merging. Customized according customer specifications.
TTOP-HBT-13
The TTOP-HBT-13 systems are table top systems allowing wafer transfer in batches of 13 wafers between two cassettes. Customized according customer specifications.
Vertical Batch Transfer
GEMINI
With its very small footprint, the GEMINI is one of the smallest semi-automatic batch wafer transfer system available worldwide. Simple to use and easy to maintain, this tool can load and unload a batch of wafers 6" or 8" from cassette to cassette in less than 30 seconds.
GEMINI Aligner
The GEMINI Aligner is a semi-automatic batch wafer transfer system with an integrated notch/flat aligner. With its vey small footprint, this tool can load and unload from cassette to cassette, a batch of wafers 6″ or 8″, thin or thick, of any substrate material.
COMET Monostation
Using the COMET Monostation is the easiest way to transfer batch of wafers 3" to 8", from cassette to cassette. The batch can contain from 1 to 25 wafers to be transferred. SECS-GEM communication available.
COMET 2 station
Using the COMET 2 STATION is the easiest way to transfer batch of wafers 3″ to 12″, from cassette to cassette or from cassette to boat. SECS-GEM communication available.
COMET 2 station pitch changing
The COMET 2 station Pitch Changing allows the transfer of a batch wafers 3″ to 8", from cassette to cassette OR from cassette to boat, with pitch change from 4.76m to 8.35mm. The batch can contain from 1 to 25 wafers to be transferred. SECS-GEM communication available.
COMET 2 station with flip
The COMET 2 station with flip allows the transfer of a batch of wafers 3″ to 8″, from cassette to cassette or from cassette to boat, with a complete rotation of the wafers. SECS-GEM communication available.
COMET 3 station
The COMET 3 station is the Operator’s favorite mass wafer transfer system. This machine allows the transfer of batches of wafers 3" to 8", from cassette to cassette or to boat, according different process: 25 to 25 ; 25/25 to 50 ; 12/13 to 50. SECS-GEM communication available
COMET 3 station with flip
Using the COMET 3 station with flip is the easiest way to transfer 25 wafers face to face or back to back, proximity or same slot process. This machine is the best mass transfer system for a safe back to back transfer, adapted for Solid Source,WET or LTO process.
COMET 4 station
Fully automatic, the COMET 4 station allows the transfer of 2 wafers batches from 2 cassettes to other 2 cassettes or boats.
COMET CVS
Customized according customer specifications,the Comet CVS can be used to complete a batch with dummies before processing it thanks to several integrated mapping system and a single wafer lifting system, or to simply transfer two batches on one. SECS-GEM communication available.
Wafer Sorting
Table Top Organizer
The Table Top Organizer is a single wafer pick & drop machine, transfering wafers within or between cassettes, 6" and 8" same machine, used for randomization, compacting, copying, completing, inverting...
SORTER 100
The Sorter 100 system are single wafer pick & drop machine. Customized according customer specifications, with 2, 3 or 4 cassette load ports, wafer size 150/200mm on the same machine.
SORTER 150/200
The Sorter 150/200 system are single wafer pick & drop machine. Customized according customer specifications, with 2, 3 or 4 cassette load ports, wafer size 150/200mm on the same machine.
SORTER OCR 150/200
The Sorter OCR 150/200 system are single wafer pick & drop machine including notch or flat alignment system and a Wafer ID reading system (OCR). Customized according customer specifications, with 2, 3 or 4 cassette load ports, wafer size 150/200mm on the same machine.
SORTER OCR 150/200 with Visual Inspection
The Sorter OCR 150/200 with Visual Inspection system are single wafer pick & drop machine including notch alignment system and OCR system, and a Visual Inspection module. Customized according customer specifications, with 2, 3 or 4 cassette load ports, wafer size 200mm.
SORTER 300
The Sorter 300 system are single wafer pick & drop machine handling 300 mm wafers. Customized according customer specifications, with 2, 3 or 4 cassette load ports. SECS-GEM communication compatible.
SORTER OCR 300
The Sorter OCR 300 system are single wafer pick & drop machine including notch alignment system and OCR system. Customized according customer specifications, with 2, 3 or 4 cassette load ports, wafer size 300mm.
Wafer Tracking
ID Reader 8″
ID Reader 8" is the best tool to avoid lot errors. Designed for using 200mm – 8″ notch aligner and OCR system, it checks your carrier tag, reads each wafer scribes, then sends the information to your Host with SECSII Gem commands