Based in France, R2D Automation is a wafer handling equipment manufacturer with over 28 years of experience on semiconductor and solar industry. Since 2007, R2D automation is wholly owned subsidiary of Amtech Systems Inc, listed at Nasdaq as ASYS.

About us

R2D Automation has over 28 years of experience in wafer handling automation. In 1992 the company created the Comet batch wafer transfer tool, a new type of first class stand alone batch wafer transfer system for Semiconductor industry. Early 2000 R2D Automation designed its first single wafer transfer system and developed a new line of 300mm batch transfer systems using a fully automated homemade scara robot.

Since then, R2D automation developed numerous wafer handling equipment and became a global supplier of semiconductor automation equipment, focussed on suplying cost effective, fast and reliable machines.

In parallel to the semiconductor activities, R2D started designing batch wafer transfer systems for the Solar Industry. In 2006 R2D Automation successfully delivered the first automation systems to be combined with diffusion furnace from Tempress (Alix automation). One year later R2D was acquired by the parent company of Tempress , Amtech Systems Inc., to create an unique integrated solution to its customer base. Amtech Systems Inc. is listed at Nasdaq as ASYS.

Since then R2D has provided over 400 diffusion automation systems to the solar industry, making it market leader in this segment. In 2014 a new generation of batch wafer transfer systems was introduced to be integrated with the Tempress 5 tube furnace platform. In this new automation wafers can transfer wafers from cassette to longboat with an high throughput, in single slot and back to back positioning, at full and half pitch spacing.



Since 2016, R2D Automation has implemented a Quality Management System, certified ISO9001.


R2D’s current product offering:


  • Batch wafer transfer systems
  • Cassettes organizer systems
  • Sorter system with Optical Character Recognition
  • Wafer ID reader systems
  • Horizontal furnace loader system
  • Horizontal furnace full automation
  • Customized solutions upon request


  • Stand-alone batch transfer system
  • Horizontal Furnace Loader
  • Horizontal Furnace Full Automation
  • Customized solutions upon request