The LINA System is a new generation of Boat Auto Loader for Horizontal furnace.
Using a Cartesian lift, the LINA will automatically load/unload multiple type of boat from Furnace paddle to buffer/Load port and back.
With his multiple boat handling system, we can manage different process avoiding cross contamination.
The LINA coupled with a shuttle and a Comet wafer transfer system could provide a full complete handling solution.
150/200mm or 300mm Furnace Automation
Different configuration are possible:
For Maintenance purpose, the lift can be removed from load station (on wheels design)
The R2D automation offering for the semiconductor industry includes the following :
300mm Diffusion Furnace Automation
300MM Automation :
150- 200mm or 300mm Automation :
Wafer Size: from 150mm/200mm or 300mm
Lift Dimension :1360 x 22360 (can be customized)
STANDARD SAFETY FEATURES
AVAILABLE OPTION :