The Comet CVS (Comet Vertical Sorter) transfering batch of wafers 3″ to 8 ” verticaly from cassette to cassette or to boat. According required customer scenario, it can be used to complete a batch with dummies before processing it thanks to several integrated mapping system and a single wafer lifting system, or to simply transfer two batches on one.
Customized to meet your different cassettes, boats and wafers specifications needs, the COMET CVS is fast, clean, reliable and accurate, and it saves valuable space thanks to its small footprint.
Simple to use and easy to maintain, the COMET CVS is a one button system operation, fully automatic, free hand operating, set up and controlled manualy directly from the front panel keyboard. All electronic parts are compatible for all COMET machines.
Moreover , the COMET CVS is compatible with SECS-GEM communication, SECSI or HSMS protocol, thanks to its R2S232 and TCP/IP communication port available on the rear side of the machine, and can be integrated in your process line (OEM customer), with Robotic arm and elevator.
Key system features
Batch completing system special features:
Standard features
Software flexibility
Specifications
Performance
Facilities and Requirements
Options
