Product description

The Comet CVS (Comet Vertical Sorter) transferring batches of wafers 3″ to 8 ” vertically from cassette to cassette or to boat.  According to required customer scenario, it can be used to complete a batch with dummies before processing it thanks to several integrated mapping system and a single wafer lifting system, or to simply transfer two batches on one.

Customized to meet your different cassettes, boats and wafers specifications needs, the COMET CVS is fast, clean, reliable and accurate, and it saves valuable space thanks to its small footprint.

Simple to use and easy to maintain, the COMET CVS is a one button system operation, fully automatic, free hand operating, set up and controlled manualy directly from the front panel keyboard. All electronic parts are compatible with all COMET machines.

Moreover , the COMET CVS is compatible with SECS-GEM communication, SECSI or HSMS protocol, thanks to its R2S232 and TCP/IP communication port available on the rear side of the machine, and can be integrated in your process line (OEM customer), with Robotic arm and elevator.

Product information

Key system features

  • Vertical wafer sorting machine
  • Wafer size 3″ to 8″
  • Customized according to customer cassettes/ boats and wafer


Batch completing system special features:

  • Single wafer lifting system on cassette with dummies
  • Mapping system on cassette with dummies
  • Mapping system on arm


Standard features

  • Peek material for pushers, retainers and boat adaptors
  • Double cassette/boat sensors
  • Carrier correctly positioned (mechanical)
  • Wafer presence detection into cassette/boat
  • Current limit on all motors
  • Power “off” security
  • Open frame, designed for a vertical laminar flow
  • LCD display indicating all cycle steps.
  • Historical data recorded (error messages data time)
  • Clean room color paper documentation

Software flexibility

  • Transfer parameters adjustable to reduce cycle time
  • Security sensor management



  • CE certification
  • SEMI Standard
  • Class 1



  • Uptime: 99.8%
  • MTBF: > 4000hrs
  • MTBA: 750 hrs
  • MTTR: < 1hr
  • MTTA: 0.005 hr
  • Breakage rate: 1 for 5.105


Facilities and Requirements

  • Power: 100-240 VAC 75 watts
  • Frequency: 50-60 Hz
  • Full Load Amps: 1.2-0.6 A
  • No need for compressed air


  • Flat or notch aligner
  • ESD combs
  • Cassettes Tag Reader (Barcode or RFID)
  • Tower Light
  • Selectable notch/flat position manual switch
  • Keyboard lock (key)