The GEMINI is a semi-automatic batch wafer transfer system with an integrated notch/flat aligner. With its vey small footprint, this tool can load and unload from cassette to cassette, a batch of wafers 6″ or 8″, thin or thick, of any substrate material.
Thanks to its front manual commands, the GEMINI can be used only for transfering wafers or for aligning Notch/Flat according the selected position, or both.
The GEMINI is customized to meet your different cassette and wafer specifications needs. Already compatible with all the most used cassettes and wafers on the semiconductor industries, the GEMINI Aligner can also be designed for special customers needs.
Key system features
Facilities and Requirements: