The COMET 2 station Pitch Changing allows the transfer of a batch wafers 3″ to 8″, from cassette to cassette OR from cassette to boat, with pitch change from 4.76m to 8.35mm. The batch can contain from 1 to 25 wafers to be transferred.
Customized to meet your different cassettes, boats and wafers specifications needs, the COMET 2 station Pitch Changing is fast, clean, reliable and accurate, and it saves valuable space thanks to its small footprint.
Simple to use and easy to maintain, the COMET 2 station Pitch Changing is a one button system operation, fully automatic, free hand operating, set up and controlled manualy directly from the front panel keyboard. All electronic parts are compatible for all COMET machines.
Moreover , the COMET 2 station Pitch Changing is compatible with SECS-GEM communication, SECSI or HSMS protocol, thanks to its R2S232 and TCP/IP communication port available on the rear side of the machine, and can be integrated in your process line (OEM customer), with Robotic arm and elevator.
Facilities and Requirements: