EN

Comet 4 station wet


Product description

Fully automatic, the COMET 4 station can be integrated inside a WET bench. This tool allows transfer 2×25 wafers 8″ from transport cassettes to a 50 position process boat.

Customized to meet your different cassettes, boats and wafers specifications needs, the COMET 4 station is fast, clean, reliable and accurate, and it saves valuable space thanks to its small footprint.

Simple to use and easy to maintain, the COMET 4 station is a one button system operation, fully automatic, free hand operating, set up and controlled manualy directly from the front panel keyboard. All electronic parts are compatible for all COMET machines.

Moreover , the COMET 4 station is compatible with SECS-GEM communication, SECSI or HSMS protocol, thanks to its R2S232 and TCP/IP communication port available on the rear side of the machine, and can be integrated in your process line (OEM customer), with Robotic arm and elevator.


Product information

Key system features

  • Batch wafer transfer from cassette to cassette or to boat
  • Transfer : 25 to 25 ; 25/25 to 50 ; 12/13 to 50.
  • Wafer size  8″
  • SECS-GEM communication (SECS I or HSMS)
  • Customized according customer cassettes/ boats and wafers
  • Small footprint
  • Fast, clean, reliable and accurate

Standard features

  • Peek material for pushers, retainers and boat adaptors
  • LCD display indicating all cycle steps.
  • IR heat sensor
  • Double cassette/boat sensors
  • Carrier correctly positioned (mechanical)
  • Wafer presence detection into cassette/boat
  • Current limit on all motors
  • Power “off” security
  • Open frame, designed for a vertical laminar flow
  • Automatic home position
  • Historical data recorded (error messages data time)
  • Clean room color paper documentation

Software flexibility

  • Transfer parameters adjustable to reduce cycle time
  • Security sensor management

Specifications:

  • CE certification
  • SEMI Standard
  • Class 1

Performance

  • Total cycle time: < 1 mn
  • Uptime: 99.8%
  • MTBF: > 4000hrs
  • MTBA: 750 hrs
  • MTTR: < 1hr
  • MTTA: 0.005 hr
  • Breakage rate: 1 for 5.105

Facilities and Requirements:

  • Weight: 52 kg
  • Power: 100-240 VAC 75 watts
  • Frequency: 50-60 Hz
  • Full Load Amps: 1.2-0.6 A
  • No need for compressed air

Options

  • SECS/GEM : Machine includes SECS/GEM communication RS232 – E4 SECS I or Ethernet – E37 HSMS-SS (TCP/IP)
  • ESD: Electrostatic dissipation of the wafers thanks to ESD material of the parts touching wafers (combs)
  • Flat /Notch aligner: Integrated Flat or Notch aligner system.
  • Carrier BC Tag Reader: Fixed barcode reader device
  • Carrier RFID Tag Reader: Fixed RFID tag reader device
  • Tower Light: Three color tower light (green, orange, red)
  • Selectable notch/flat position: The position of notches/flat after alignment can be set thanks to a switch
  • Keyboard lock: Machine parameter access are locked manually thanks to a key