The TTOP-HBT-13 are table top systems allowing wafer transfer in batches between two cassettes
These equipments are mainly required when the vertical batch transfer is unsafe, because cassette used are with insufisant or absent narrow bottom slot, when the position of the wafers in the slots does not allow them to be picked up correctly.
The TTOP-HBT-13 systems are the best solutions to safely transfer your wafer batches, even with warped wafers or special cassettes.
To transfer wafer batch, the machine is equipped with a gripper of 13 postions, with 2 edge contact ceramic finger for each position that ensure an accurate and safe handling of wafers.
Moreover, the TTOP-HBT-13 systems can be used on local mode or on remote mode thanks to SECS-GEM communication to the fab host (E30)
Key system features
Software & Interface
Facilities and Requirements