TTOP-HBT-13


Product description

 

The TTOP-HBT-13  are table top systems allowing wafer transfer in batches between two cassettes

These equipments are mainly required when the vertical batch transfer is unsafe, because cassette used are with insufisant or absent narrow bottom slot, when the position of the wafers in the slots does not allow them to be picked up correctly.
The TTOP-HBT-13 systems are the best solutions to transfer safely your wafer batches, even with warped wafers or special cassettes.

To transfer wafer batch, the machine is equipped with a gripper of 13 postions, with 2 edge contact ceramic finger for each position that ensure an accurate and safe handling of wafers.

Moreover,  the TTOP-HBT-13 systems can be used on local mode or on remote mode thanks to SECS-GEM communication to the fab host (E30)


Product information

Key system features

  • Table Top Horizontal Batch Transfer system
  • 13 wafers batch transfer
  • 2 Load Ports
  • Wafer edge contact gripper
  • Wafer size: 150mm OR 200mm
  • Wafer bow: ± 0.5 mm
  • Customized according customer cassettes and wafers

Standard features

  • Gripper: 13 positions with 2 edge contact ceramic finger for each position
  • 12” color LCD Touchscreen + Mouse + USB port
  • Cassette presence and placement detection
  • Wafer detection in cassette
  • Wafer detection in gripper
  • EMO button
  • Current limiters on all motors
  • Error message and cycles recorded
  • Tower light
  • Clean Room and PDF documentation

Specifications

  • CE certification
  • SEMI Standard
  • Class 1

Software & Interface

  • Friendly and intuitive
  • Standard or customizable
  • Access level with passwords
  • Wafer recorveries
  • Restart after error
  • Easy integration with other systems by SECII-GEM, ASCII, RS, TCPIP

Performance

  • Cycle time: <30 seconds
  • MTBF: > 4000 hours
  • MTTR: < 1hr
  • Uptime: > 99.8 %

Facilities and Requirements

  • Width: 620mm ; Depth: 640mm ; Height: 840mm
  • Weight: 45 kg
  • Power: 100-240 VAC
  • Frequency: 50-60 Hz
  • Full Load Amps: 2.5 A

Options:

  • Carrier BC Tag Reader: Barcode reader gun  device
  • Carrier RFID Tag Reader: Fixed RFID tag reader device