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SORTER 300


Product description

The SORTER 300 systems are compact, fast, reliable and meet your different requirements.
Preprogrammed recipes are available as Randomizing, Copying, Inverting, Completing, Compacting…
You can also create your own recipes using different parameters.
The SORTER 300 are using motors, belts and other parts proven by 16 years of experience in Fab automations
The spare parts for all your different Sorters systems are listed in only one page
The visual interface is clear, direct and can be customized.
Touch buttons, Touchscreen, Trackball interfaces.


Product video


Product information

Key system features

  • Cassettes sorting standalone machine
  • Wafer size 300 mm
  • 2,3 or 4 load port
  • End effector: backside vacumm or edge contact
  • Preprogrammed factory recipes (Randomization, Compacting, Completing, Copying, Inverting)
  • Customizable recipes
  • Manual transfer (Single wafer transfer)
  • Customized according customer cassettes and wafers
  • Optimized footprint
  • Easy for integration to any process tools

Standard features

  • 12” color LCD Touchscreen
  • Automatic mapping system
  • Cross or double slots detection
  • Wafer detection in cassette
  • Current limiters on all motors
  • Error message and cycles recorded
  • Customizable Light Tower
  • SECS/GEM Host connection [Ethernet – TCP/IP – E37 HSMS-SS]
  • Tower light
  • Clean Room and PDF documentation

Options

  • FOUP/POD opener
  • Laminar Flow
  • Carrier TAG reader
  • Ionization system
  • Fan filter unit

Software flexibility

  • Standard or customizable software
  • Wafer recorveries
  • Restart after error
  • Friendly interface and customizable
  • Easy integration with other systems by SECII-GEM, ASCII, RS, TCPIP

Specifications

  • CE certification
  • SEMI Standard
  • Class 1

Facilities and Requirements

  • Power: 100-240 VAC 75 watts
  • Frequency: 50-60 Hz
  • Full Load Amps: 10 A