The COMET Monostation is a semi-automatic batch wafer transfer system. This machine is used to transfer batch of wafers 3″ to 8″, from cassette to cassette or to boat. The batch of wafer can contain from 1 to 25 wafers to be transferred.
Customized to meet your different cassettes, boats and wafers specifications needs, the COMET Monostation is fast, clean, reliable and accurate, and it saves valuable space thanks to its small footprint.
Simple to use and easy to maintain, the COMET Monostation is set up and controlled directly from the front panel keyboard. All electronic parts are compatible for all COMET machines.
Moreover, the COMET Monostation is also compatible with SECS-GEM communication, SECSI or HSMS protocol, thanks to its R2S232 and TCP/IP communication port available on the rear side of the machine.
Key system features
Facilities and Requirements