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GEMINI Aligner


Product description

The GEMINI Aligner is a semi-automatic batch wafer transfer system with an integrated notch/flat aligner. With its vey small footprint, this tool can load and unload from cassette to cassette, a batch of wafers 6″ or 8″, thin or thick, of any substrate material.

Thanks to its front manual commands, the GEMINI Aligner can be used only for transfering wafers or for aligning Notch/Flat according the selected position, or both.

The GEMINI Aligner is customized to meet your different cassette and wafer specifications needs. Already compatible with all the most used cassettes and wafers on the semiconductor industries, the GEMINI Aligner can also be designed for special customers needs.

 


Product video


Product information

Key system features

  • Batch wafer transfer system
  • Cassette to cassette transfer
  • Wafer size 6″ & 8″
  • Customized according customer cassettes and wafers
  • Integrated Notch/Flat aligner
  • Selectable notch position button
  • Transfer ON/OFF button
  • Very small footprint

Standard features:

  • POM ESD pushers and retainers
  • Double cassette sensors
  • Ergonomic buttons (bigger and brighter)
  • Wafer detection in cassette
  • Wafer detection on head
  • Safety wafer detection if wafer down on head/Pusher
  • Current limiters on all motors
  • Electric safety device (current cut)
  • Power “off “security
  • Top pushers safety interlock
  • Open frame, designed for a vertical laminar flow
  • Automatic home position
  • Clean Room color paper and electronic PDF documentation

Specifications:

  • CE certification
  • SEMI Standard
  • Class 1

Facilities and Requirements:

  • Width: 204mm ; Depth: 551mm ; Height: 570mm
  • Weight: 12 kg
  • Power: 100-240 VAC
  • Frequency: 50-60 Hz
  • Full Load Amps: 1.2-0.6 A

Performance:

  • Total Cycle Time: < 1mn 30
  • MTBF: > 4000 hours
  • MTTR : < 1 hour
  • UPTIME > 99 %