The LISA-AE (LIft Six Axes – Automation Embedded) system is a Full Automation for Horizontal Furnace, with a POD opener dock and a R2D COMET system integrated to transfer wafer batches from cassettes to boat, and using a 6 axis robot to load/unload boats to the furnace paddles.
To load the furnace, the operator place a POD opener at the dock and requests loading. Following, the arm from the POD will transfer the cassette to the COMET ( horizontal to vertical position), then the COMET transfers the wafer batch from the cassette to the boat. After wafer batch being transferred inside the boat, the 6 axis robot picks up the boat and put it on the
paddle. Reverse process for unloading. The empty boats are stored on a boat buffer integrated.
The LISA-AE system is entirely customized to meet your different cassettes, boats and wafers specifications needs, and to be compatible with your POD opener and Horizontal Furnace model.
SECS-GEM communication available.
Key system features
COMET System features ready to operate includes:
Facilities and Requirements