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Table Top Organizer


Product description

The Table Top Organizer is a single wafer pick & drop machine, transfering wafers within or between cassettes.

Under control of a touchscreen panel PC, all user commands and equipment maintenance are done through the smart R2D Automation interface. Moreover, the Table Top Organizer is also compatible with SECS/GEM communication,  TCP/IP – E37 HSMS-SS logical protocol, thanks to its Ethernet communication port available on the rear side of the machine.

Once cassettes placed on load ports, the Table Top Organizer maps cassettes, detecting wafers presence and position, detecting cross or double slots, and then report the result on the touch screen interface. Then, the user can perform pre-programmed recipes as randomization, compacting, completing, copying, or inverting recipes. The user can also create his own recipes and manually transfer the selected wafers. All transfers are instantly reported to the interface.

Customized according customer cassettes and wafers, the Table Top Organizer can handle 6″ and 8″ wafers on the same machine (automatic size detection), and is compatible with thin wafer up to 150µm on 6″, 180 on 8″, from various substrate materials. Depending on wafers warpage and customer requirements, we propose different shapes and materials of backside vacuum or edge contact end effectors, that will ensure the best safe handling of your wafers. The Table Top Organizer ensure a safe wafer handling through its numerous safety sensors active throughout the transfer,  detecting cassettes and wafers presence and placement at every stage.


Product video


Product information

Key system features

  • Cassettes organizer table top machine
  • Two load ports
  • Compatible 6″ and 8″ wafers (same machine)
  • Compatible thin wafer up to 180µm on 8″, 150 on 6″
  • End effector: backside vacumm or edge contact
  • Preprogrammed factory recipes (Randomization, Compacting, Completing, Copying and Inverting)
  • Customizable recipes
  • Manual transfer (Single wafer transfer)
  • Customized according customer cassettes and wafers

Standard features

  • 12” color LCD Touchscreen
  • Automatic mapping system
  • Cross or double slots detection
  • Wafer detection in cassette
  • Current limiters on all motors
  • Error message and cycles recorded
  • Customizable Light Tower
  • SECS/GEM Host connection [Ethernet – TCP/IP – E37 HSMS-SS]
  • Clean Room and PDF documentation

Software flexibility

  • Customized Software.
  • Manual Visual Inspection Recipe included
  • Administrator, Operator passwords & others

Specifications

  • CE certification
  • SEMI Standard
  • Class 1

Performance

  • Troughput: From 350 WPH (thin wafers) to 600 WPH (std)
  • MTBF: > 4000 hours
  • MTTR: < 1hr
  • Uptime: > 99.8 %

Facilities and Requirements

  • Width: 620mm ; Depth: 640mm ; Height: 840mm
  • Weight: 45 kg
  • Power: 100-240 VAC
  • Frequency: 50-60 Hz
  • Full Load Amps: 1.2-0.6 A
  • Vacuum: -0.5 to -0.8 bar (Ø6mm)

Options:

  • Carrier BC Tag Reader: Barcode gun or fixed barcode reader device
  • Carrier RFID Tag Reader: Fixed RFID tag reader device