Using the COMET 2 STATION is the easiest way to transfer batch of wafers 3″ to 12″, from cassette to cassette or from cassette to boat. The batch can contain from 1 to 25 wafers to be transferred.
Customized to meet your different cassettes, boats and wafers specifications needs, the COMET 2 STATION is fast, clean, reliable and accurate, and it saves valuable space thanks to its small footprint.
Simple to use and easy to maintain, the COMET 2 STATION is set up and controlled directly from the front panel keyboard. All electronic parts are compatible for all COMET machines.
Moreover, the COMET 2 STATION is also compatible with SECS-GEM communication, SECSI or HSMS protocol, thanks to its R2S232 and TCP/IP communication port available on the rear side of the machine.
Key system features
Facilities and Requirements: