The GEMINI 300 is a semi-automatic batch wafer transfer system. This tool can load and unload from FOUP to FOSB and back, a batch of wafers 12″ of any substrate material. The GEMINI 300 is customized to meet your different FOUP/FOSB and wafer specification needs.
Options:
Software:
Benefits:
Batch wafer transfer system
FOUP to FOSB transfer and back
Fast safety cycle
Performance:
Specifications:
